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白光干涉仪
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白光干涉仪 Topos One
Topos One 是一款身型小巧、测量迅速、高精度的相干扫描（白光）干涉仪，适合集成于精密光学、消费电子、半导体等先进制造产线，实现非接触式、快速、高分辨率、高精度的三维表面形貌测量。以超精密机床为例，Topos One可实现在机原位高分辨表面形貌测量，并获得与离线测量同样等级的精度，避免工件的二次装夹误差，极大提高加工效率与产品质量。
白光干涉仪 Topos 300
Topos 300 搭载先进的5轴精密运动平台与自动轨迹扫描技术，可实现大口径自由曲面多功能检测，包括全域法线追踪、一键调焦调平、自动迹规划、子孔径拼接等智能自动化功能。
白光干涉仪 Topos 100
Topos 100 基于白光干涉测量原理，是用于测量材料表面形貌最精确的技术之一，搭载先进扫描干涉技术与算法，实现优于皮米(pm)级表面测量精度，可轻松捕捉近原子尺度表面形貌细节。该机型适合在研发实验室、质量检验实验室以及生产环境中使用。
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